LS1 X-axis Stage

A high-accuracy stage capable of positioning and controlling a stroke of several to tens of millimeters with a high resolution of 20 to 40 nm. For the actuator of this stage, PiezoMotor’s PiezoLEGS® actuator is adopted. With two types in the actuator thrust, 6 N and 20 N, offered, the stage maintains a holding force almost equal to the thrust even when it is static, and ensures stability in static state, and high positioning accuracy against disturbance. This stage is available in two models in body material, an aluminum model and a stainless steel model.