Standardized large stage with top table size up to 1500mm x 1500mm. By arranging the required number of XYθ modules, it is possible to support further increase in size.
By adopting the XYθ module, a thin and light mechanism without a saddle has been realized. A large space is obtained in the center of the top table and base, and it can be used as an optical inspection device or a continuity tester.