TS1R Rotary Stage

TS1R Rotary Stage

This product is a high-accuracy stage capable of performing position control with high resolution of 20 nm or 40 nm in a moving range of tens of mm. Adopting ultrasonic actuator SPPA (Super Precision Piezo Actuator), this stage has high static stability with low heat generation and with friction retention.

02-613-9166

@inb-thk

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