TS1R Rotary Stage

TS1R Rotary Stage

This product is a high-accuracy stage capable of performing position control with high resolution of 20 nm or 40 nm in a moving range of tens of mm. Adopting ultrasonic actuator SPPA (Super Precision Piezo Actuator), this stage has high static stability with low heat generation and with friction retention.

TC Controller

TC Controller

This product is a high-accuracy stage capable of performing position control with high resolution of 20 nm or 40 nm in a moving range of tens of mm. Adopting ultrasonic actuator SPPA (Super Precision Piezo Actuator), this stage has high static stability with low heat generation and with friction retention.

TS2 XY-axis Stage

TS2 XY-axis Stage

This product is a high-accuracy stage capable of performing position control with high resolution of 20 nm or 40 nm in a moving range of tens of mm. Adopting ultrasonic actuator SPPA (Super Precision Piezo Actuator), this stage has high static stability with low heat generation and with friction retention.

TS1 X-axis Stage

TS1 X-axis Stage

This product is a high-accuracy stage capable of performing position control with high resolution of 20 nm or 40 nm in a moving range of tens of mm. Adopting ultrasonic actuator SPPA (Super Precision Piezo Actuator), this stage has high static stability with low heat generation and with friction retention.

RB-USP

RB-USP

The rotation accuracy of the USP-Grade Series achieves the ultra-precision grade that surpasses the highest accuracy standards such as JIS Class 2, ISO Class 2, DIN P2 and AFBMA ABCE9.

DP

DP

Since the spline shaft’s surface is provided with a mirror finish, smooth slide is achieved. In addition, the large contact area and the concentricity, which enables the center to be automatically determined as a torque is applied, allow the product to demonstrate stable torque transmission.

FBL

FBL

Slide Rail model FBL is a thin, compact, lightweight and ultra-low price slide unit for finite motion. It has two rows of balls placed between an inner rail and an outer rail.